pysrw.lib.srwlib.srwl_opt_setup_Hartmann_sensor

pysrw.lib.srwlib.srwl_opt_setup_Hartmann_sensor#

pysrw.lib.srwlib.srwl_opt_setup_Hartmann_sensor(_delta: float, _atten_len: float, _thick: float, _hx: float, _hy: float, _pitch_x: float, _pitch_y: float, _mask_nx: int, _mask_ny: int, _grid_nx: int, _grid_ny: int, _grid_sh: int, _grid_dx: float, _grid_dy: float = 0, _grid_angle: float = 0, _mask_x0: float = 0, _mask_y0: float = 0)[source]#

Setup Transmission type Optical Element which simulates a mask array for at-wavelength metrology.

Parameters:
  • _delta (float) – The refractive index decrement (can be one number of array vs photon energy)

  • _atten_len (float) – The attenuation length [m] (can be one number of array vs photon energy)

  • _thick (float) – The thickness of mask [m]

  • _hx (float) – The sampling interval in x-direction [m]

  • _hy (float) – The sampling interval in y-direction [m]

  • _pitch_x (float) – The grid pitch in x-direction [m]

  • _pitch_y (float) – The grid pitch in y-direction [m]

  • _mask_nx (int) – The number of pixels in x-direction [1]

  • _mask_ny (int) – The number of pixels in y-direction [1]

  • _grid_nx (int) – The number of grids in x-direction

  • _grid_ny (int) – The number of grids in y-direction

  • _grid_sh (int) – The grid shape. 0: Circular grids case. 1: Rectangular grids case. 2: 2-D phase grating

  • _grid_dx (float) – The grid dimension in x-direction, width for rectangular or elliptical grids [m]

  • _grid_dy (float) – The grid dimension in y-direction, height for rectangular or elliptical grids [m]

  • _grid_angle (float) – The tilt angle of the grid [rad]

  • _mask_x0 (float) – The center of mask in x

  • _mask_y0 (float) – The center of mask in y

Returns:

transmission (SRWLOptT) type optical element which simulates the PMA

Return type:

SRWLOptT